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oai:drum.lib.umd.edu:1903/85662016-03-29T06:28:22Zcom_1903_2234com_1903_1654com_1903_2col_1903_2765col_1903_3

Ghodssi, Reza McGee, Jonathan Adam Digital Repository at the University of Maryland University of Maryland (College Park, Md.) Electrical Engineering 2008-10-11T05:44:30Z 2008-10-11T05:44:30Z 2008-08-11 http://hdl.handle.net/1903/8566 This thesis presents the development of a Micro-Electro-Mechanical System (MEMS) monolithic in-plane tunable optical filter in both Indium Phosphide and Silicon. By placing one mirror of a waveguide-based Fabry-Perot interferometer on an electrostatically-actuated beam, a tunable filter is constructed. This is the first demonstration of a waveguide-coupled MEMS tunable optical filter in any material system. Filters with a tuning range of 40 nm from a wavelength 1550 nm with a linewidth of 35 nm are demonstrated. Future work will concentrate on improving the filter's optical characteristics, limited by etch-induced facet roughness, and integration with active photonic devices. 5804294 bytes application/pdf en_US Monolithic In-Plane Tunable Optical Filter Thesis Engineering, Electronics and Electrical Indium Phosphide Optical Filter Tunable Filter Silicon-On-Insulator open.access