Sheet1

This Spreadsheet estimates values of thermomechanical noise and position detection sensitivity for capacitive detection, using rectangular cantilevers	
To find values, change any values highlighted in green. Note the units in the adjacent column. The highlighted cells in blue gives sensitivity estimates	
The cells highlighted in yellow give values for the circuit analysis as well as circuit component values.	
ALL VALUES ARE IN SI UNITS UNLESS OTHERWISE NOTED
GaAs Capacitive Scheme Parameters
Thickness is	30.00	nm
The length is	10.00	Microns
and width is	3.00	Microns
for a gap of	3.00	Microns

Beam Paramters
Young's Modulus	E	8.55E10	Pa	Boltzman	1.38E-23	SI units
Thickness in m	t	3.00E-08	m	Q	15000	
Width in m	W	3.00E-06	m	T	4.2	K
Length in m	L	1.00E-05	m
density	5320	kg/m3
Area of the cantilever	Area	3.00E-11	m2 =	3.00E-07	cm2
Capacitive Gap in m	Cap. Gap	3.00E-06	m =	3.00E+00	um2
Mass of cantilever	m	1.15E-15	SI units
Stiffness	k	1.73E-03	N/m
Resonance Frequency	fc	1.95E+05	Hz
Frequency	w0	1.17E+06
4kkT	4.01E-25	2pifQ	5.78E+10
Thermomechanical Noise Calculated	Sf-thermal	0	Sd due to thermal noise	0
Capacitance calculations
Capacitance of the cantilevers	C	8.85E-17
Calculated Pull-in in volts	Pull-in Vol	10.8342676694	Volts
10834.2676693999	Millivolts
80% of pull-in voltage	8.6674141355

Voltage Noise of amplifier	Amplifier Noise	50	nV/.Rt. Hz	If parasitic capacitance can be resonated away	
Position detection sensitivity with parasites	Sd	3.74E-10	No Parasites (Sd)	0	
Corresponding force sensitivity with parasites	Sf-detector	0	Sf	2.00E-21	

Circuit Analysis
The following are values for an equivalent circuit to the mechanics
Lm	17576.8989328311	H
Cm	4.14E-17	F
This is the 'mechanical' impedance	Rm	1.37E+06	ohm	
This is the required tank circuit impedance	Z-tank	8285.433712088	ohm	using Z-LC=SQRT(Rm*50)
Corresponding L of tank	L-tank	7.07E-03	H	Q for Tank	1.66E+02	
C of tank	C-tank	0.0000000001	F	

Parasitic Capacitance estimates
Assuming 220x220 um total area, bond pads that are 150X150	Area of bond pads	0.0000000484
Assuming a projection of 50um length and 20um width	Projection area	0.000000001
Total	0.0000000494
Bond_pad Capacitance	1.79E-12	F
Wirebond Capacitance	1.00E-13
HEMT Input	2.10E-14
Total Parasites	1.91E-12
Casimir Force
Force	5.93E-11	N
Force Required to bring plates together
Force	5.19E-09	N
Is this Design OK for Casimir Force?
Yes, Casimir Forces are not sufficient to cause stiction
Sheet2
Sheet3